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査読付論文　Peer-reviewed papers

2024年

  • Z. Zhao, M. Yamamoto, S. Takamatsu, and T. Itoh, "A Wireless Passive Pressure-Sensing Method for Cryogenic Applications Using Magnetoresistors," Sensors, vol. 24, no. 3, p. 717, 2024.
  • M. Yamamoto, N. Tomita, S. Takamatsu, and T. Itoh, "Piezoelectric Stretchable Sensor with a Vertical Wavy Structure Fabricated by Combining Dip Coating and Micro-corrugation Process," International Journal of Precision Engineering and Manufacturing, pp. 1-8, 2024.

2023年

  • S. Muramatsu, Y. Kohata, E. Hira, Y. Momoi, M. Yamamoto, S. Takamatsu, and T. Itoh, "Margined Horn-Shaped Air Chamber for Body-Conduction Microphone," Sensors, vol. 23, no. 9, p. 4565, 2023.
  • C. Shimodan, M. Yamamoto, H. Sawada, Y. Muneta, S. Arai, H. Okada, S. Takamatsu, and T. Itoh, "Stability Evaluation of Reference and Indicating Electrodes of pH Sensor during Monitoring of Cow’s Rumen," Sensors and Materials, vol. 35, no. 1, pp. 15-24, 2023.
  • S. Takamatsu and T. Itoh, "Investigation of Mechanical and Electrical Properties of E-textile Bioelectrode Consisting of Conductive Polymer and Ionic Liquid Gel on Knit Fabric," IEEJ Transactions on Sensors and Micromachines, vol. 143, no. 1, pp. 2-5, 2023.
  • S. Takamatsu, K. Wakabayashi, J. Ohyama, M. Chikai, and T. Itoh, "Multilayer Interconnection Structure for a Wearable Vibration Motor Array in Tactile-feedback Devices," IEEJ Transactions on Sensors and Micromachines, vol. 143, no. 1, pp. 19-20, 2023.
  • N. Tomita, S. Takamatsu, and T. Itoh, "Fabrication of an E-Textile Bioelectrode Array with Screen-Printed Wiring and an Ionic Liquid Gel toward Cutaneous Whole-Body Electromyography," IEEE Access, 2023.
  • Y. Yashiro, M. Yamamoto, Y. Muneta, H. Sawada, R. Nishiura, S. Arai, S. Takamatsu, and T. Itoh, "Comparative Studies on Electrodes for Rumen Bacteria Microbial Fuel Cells," Sensors, vol. 23, no. 8, p. 4162, 2023.
  • Z. Zhao, J. Fastier-Wooller, M. Yamamoto, S. Takamatsu, and T. Itoh, "A wireless passive vibration sensing method for cryogenic applications," Applied Physics Letters, vol. 123, no. 19, 2023.
  • 村松駿, 平瑛美, 桃井康行, 山本道貴, 高松誠一, and 伊藤寿浩, "体導音マイクを用いた犬の掻破行動の強度推定," 電気学会論文誌 E (センサ・マイクロマシン部門誌), vol. 143, no. 7, pp. 200-201, 2023.

2022年

  • S. Muramatsu, S. Takamatsu, and T. Itoh, "Separation of Aortic and Pulmonary Components from Second Heart Sounds without an Assumption of Statistical Independence," Sensors & Materials, vol. 34, 2022.
  • S. Muramatsu, M. Yamamoto, S. Takamatsu, and T. Itoh, "Non-Contact Heart Sound Measurement Using Independent Component Analysis," IEEE Access, vol. 10, pp. 98625-98632, 2022.
  • H. Nogami, H. Okada, S. Takamatsu, N. Kawano, T. Kobayashi, R. Maeda, and T. Itoh, "Wearable MEMS Sensor Nodes for Animal Health Monitoring System," Advanced MEMS/NEMS Fabrication and Sensors, pp. 283-305, 2022.
  • S. Takamatsu, S. Sato, and T. Itoh, "Stress concentration-relocating interposer in electronic textile packaging using thermoplastic elastic polyurethane film with via holes for bearing textile stretch," Scientific Reports, vol. 12, no. 1, p. 9269, 2022.
  • S. Takamatsu, S. Sato, and T. Itoh, "Urethane-foam-embedded silicon pressure sensors including stress-concentration packaging structure for driver posture monitoring," Sensors, vol. 22, no. 12, p. 4495, 2022.
  • M. Yamamoto, S. Okuda, S. Takamatsu, and T. Itoh, "Combination of Micro-Corrugation Process and Pre-Stretched Method for Highly Stretchable Vertical Wavy Structured Metal Interconnects," Micromachines, vol. 13, no. 8, p. 1210, 2022.

2021年

  • S. Ma, Q. Yao, T. Masuda, S. Higaki, K. Yoshioka, S. Arai, S. Takamatsu, and T. Itoh, "Development of noncontact body temperature monitoring and prediction system for livestock cattle," IEEE Sensors Journal, vol. 21, no. 7, pp. 9367-9376, 2021.
  • S. Takamatsu, K. Minami, and T. Itoh, "Fabrication of Highly Stretchable Strain Sensor Fiber by Laser Slitting of Conductive-polymer-coated Polyurethane Film for Human Hand Monitoring," Sensors & Materials, vol. 33, 2021.
  • S. Takamatsu, T. Yamashita, and T. Itoh, "Development of Extremely Large Area Light-emitting-diode-embedded Fabric and Investigation of Its Mechanical Properties," Sensors & Materials, vol. 33, 2021.

2020年

  • Michitaka Yamamoto, Ryu Karasawa, Shinji Okuda, Seiichi Takamatsu, Toshihiro Itoh, "Long wavy copper stretchable interconnects fabricated by continuous microcorrugation process for wearable applications," Engineering Reports 2(3) 2020
  • Shogo Higuchi, Hironao Okada, Seiichi Takamatsu, Toshihiro Itoh, “Valve-Actuator-Integrated Reference Electrode for an Ultra-Long-Life Rumen pH Sensor,” 2020.2 Sensors 20(5) 1249
  • S. Ma, Q. Yao, T. Masuda, S. Higaki, K. Yoshioka, S. Arai, S. Takamatsu, and T. Itoh, "Development of an Anomaly Detection System for Cattle Using Infrared Image and Machine Learning," Sensors & Materials, vol. 32, 2020.
  • K.-C. Peng, M.-C. Sung, F.-K. Wang, and T.-S. Horng, "A wireless-frequency-locked-loop-based vital sign sensor with quadrature tracking and phase-noise reduction capability," IEEE Sensors Journal, vol. 21, no. 8, pp. 9706-9715, 2020.
  • M. Yamamoto, T. Matsumae, Y. Kurashima, H. Takagi, T. Suga, S. Takamatsu, T. Itoh, and E. Higurashi, "Effect of Au film thickness and surface roughness on room-temperature wafer bonding and wafer-scale vacuum sealing by Au-Au surface activated bonding," Micromachines, vol. 11, no. 5, p. 454, 2020.
  • 奥田真司, 山本道貴, 高松誠一, and 伊藤寿浩, "ゴムストレッチ基板とコルゲーションマシーンを用いた高伸縮性微小縦波構造銅配線の作製," 電気学会論文誌 E (センサ・マイクロマシン部門誌), vol. 140, no. 7, pp. 186-187, 2020.

2019年

  • Yoshiyuki Kaiho,Seiichi Takamatsu, and Toshihito Itoh, “Method of Estimating Heatstroke Risk Using Wristwatch-type Device,” Sensors and Materials, Vol. 31, No. 12 (2019) 4061–4068 4,
  • Yoshiyuki Kaiho, and Toshihito Itoh, “Intuitive Risk Information Display Via Skin for Wearable Devices,” SICE Journal of Control, Measurement, and System Integration
  • S. Ryoki, M. Yamamoto, K. Mochizuki, S. Takamatsu, T. Itoh, “Cantilever Structure Placed in Liquid Sandwiched between Soft-Thin Membranes to Realize Wide Bandwidth Harvester”, Appl.Phy. Let. vol. 115, no.18m pp.183902-5, 2019
  • S. Ryoki, and T. Itohフラクタル次元を用いたポンプの音波による状態把握　電気学会誌IEEJ、Vol. 140 No. 6
  • 山本道貴, 松前貴司, 倉島優一, 高木秀樹, 須賀唯知, 伊藤寿浩, 日暮栄治, ”極薄Au薄膜を用いたウェハスケール・大気中常温接合のためのプラズマ処理方法の検討”, 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌, vol.139, no.7, pp. 217-218, 2019.
  • M. Yamamoto, Y. Kunimune, T. Matsumae, Y. Kurashima, H. Takagi, Y .Iguhi, Y. Honda, T. Suga, T. Itoh, E. Higurashi, “Room-temperature pressureless wafer scale hermetic sealing in air and vacuum using surface activated bonding with ultrathin Au films”, Jpn. J. Appl. Phys. vol. 59, no. SBBB01-4, 2019.
  • Shan, Guansong; Wang, Dong F.; Song, Jie; Zhao, Ziqi; Yang, Xu; Itoh, Toshihiro, Bistable Current Sensing Scheme Applicable to Two-Wire DC Appliances, IEEE SENSORS JOURNAL, 19, 6, 2039-2046 (2019)
  • Liu, Yang; Lin, Yuan; Lan, Qinhong; Wang, Dong F.; Itoh, Toshihiro; Maeda, Ryutaro, A high accuracy fluxgate DC current sensor applicable to two-wire electric appliances, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 25, 3, 877-885 (2019)
  • L. Zhang, R. Takei, J. Lu, N. Makimoto, T. Itoh, and T. Kobayashi, Development of Energy Harvesting MEMS Vibration Sensor with Wideband Response Function in Low-Frequency Domain, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS，25, 12, 1-7 (2019)
  • Yamamoto, Michitaka; Matsumae, Takashi; Kurashima, Yuichi; Takagi, Hideki; Suga, Tadatomo; Itoh, Toshihiro; Higurashi, Eiji, Growth Behavior of Au Films on SiO2 Film and Direct Transfer for Smoothing Au Surfaces, INTERNATIONAL JOURNAL OF AUTOMATION TECHNOLOGY, 13, 2, 254-260 (2019)
  • S. Takamatsu, Goto Shintaro, M. Yamamoto, T. Yamashita, T. Kobayashi, and T. Itoh, Plastic-scale-model assembly of ultrathin film MEMS piezoresistive strain sensor with conventional vacuum-suction chip mounter，Scientific Reports，9，pp.1893-1-1893-8、(2019)
  • M. Yamamoto, T. Matsumae, Y. Kurashima, H. Takagi, T. Suga, T. Itoh, and E. Higurashi, Comparison of Argon and Oxygen Plasma Treatments for Ambient Room-temperature Wafer-scale Au-Au Bonding Using Ultrathin Au Films， Micromachines, 10, 2，pp.119-1-119-12、(2019)
  • Higaki, Shogo; Miura, Ryotaro; Suda, Tomoko; Andersson, L. Mattias; Okada, Hironao; Zhang, Yi; Itoh, Toshihiro; Miwakeichi, Fumikazu; Yoshioka, Koji, Estrous detection by continuous measurements of vaginal temperature and conductivity with supervised machine learning in cattle, THERIOGENOLOGY, 123, 90-99 (2019)

2018年

  • Yusuke Takei, Shintaro Goto, Seiichi Takamatsu, Toshihiro Itoh, and Takeshi Kobayashi, Flexible Contact Pressure Sensor based on Ultrathin Piezoresistive Silicon Membrane Capable of Strain Compensation, SENSORS AND MATERIALS 30, 2999-3007, 2018
  • Seiichi Takamatsu, Takahiro Yamashita, Tetsuhiko Murakami, Atsuji Masuda, and Toshihiro Itoh, Meter-scale Flexible Touch Sensor Using Projection Capacitive Measurement Technique and Fabric Electrode for Human Position Detection, SENSORS AND MATERIALS 30, 3039-3051 2018
  • Ryoki, Shinichi; Kunifuji, Takashi; Itoh, Toshihiro, Safety, Technologies in Autonomous Decentralized Railway Control System and its Future Studies, IEICE TRANSACTIONS ON COMMUNICATIONS, E101B, 8, 1768-1774 (2018)
  • T. Yamashita, S. Takamatsu, H. Okada, T. Itoh, Development of Flexible Piezoelectric Strain Sensor Array, Electrical Engineering in Japan, 204, 52 (2018).
  • Zymelka, Daniel; Yamashita, Takahiro; Takamatsu, Seiichi; Itoh, Toshihiro; Kobayashi, Takeshi, Printed strain sensors for early damage detection in engineering structures, JAPANESE JOURNAL OF APPLIED PHYSICS, 57, 5, 05GD05 (2018)
  • Yamamoto, Michitaka; Higurashi, Eiji; Suga, Tadatomo; Sawada, Renshi; Itoh, Toshihiro, Properties of various plasma surface treatments for low-temperature Au-Au bonding, JAPANESE JOURNAL OF APPLIED PHYSICS, 57, 4, 04FC12-1-6 (2018)
  • L. Zhang, J. Lu, H. Nogami, H. Okada, T. Itoh, S. Arai, Solid-state pH Sensor Prototype for Real-time Monitoring of the Rumen pH value of Japanease Cows, Microsystem Technlogies- Micro-and Nanosystems- Information Storage and Processing Systems, 24, 457 (2018).

2017年

  • L. Zhang, J. Lu, H. Okada, H. Nogami, T. Itoh, S. Arai, Low-Power Highly Sensitive pH Sensor With mu dots Protective Structures for Monitoring Rumen in Cows in Real-Time, IEEE Sensors Journal, 17, 7281 (2017).
  • D. Zymelka, K. Togashi, R. Ohigashi, T. Yamashita, S. Takamatsu, T. Itoh, T. Kobayashi Printed strain sensor array for application to structural health monitoring，Smart Materials and Structures, 26, 10, 105040-1-105040-8 (2017)
  • D. Zymelka, T. Yamashita, S. Takamatsu, T. Itoh, T. Kobayashi, Thin-film flexible sensor for omnidirectional strain measurements, Sensors and Actuators A-Physical, 263, 391 (2017).
  • Miura, Ryotaro; Yoshioka, Koji; Miyamoto, Toru; Nogami, Hirofumi; Okada, Hironao; Itoh, Toshihiro, Estrous detection by monitoring ventral tail base surface temperature using a wearable wireless sensor in cattle, ANIMAL REPRODUCTION SCIENCE, 180, 50-57 (2017)
  • 鈴木章夫、藤本淳、前田龍太郎、伊藤寿浩、無線ユビキタスセンサを用いた電力モニタリング～第四報：コンビニエンスストア1987店舗における大規模実証実験から得られた店舗消費電力量の解析、Journal of Japan Society of Energy and Resources, Vol.38, No.4, 1-9 (2017).
  • D. Zymelka, T. Yamashita, S. Takamatsu, T. Itoh, T. Kobayashi, Printed strain sensor with temperature compensation and its evaluation with an example of applications in structural health monitoring, JAPANESE JOURNAL OF APPLIED PHYSICS, 56, 5, 05EC02-1-05EC02-5 (2017)
  • R. Takei, H. Okada, D. Noda, R. Ohta, T. Takeshita, T. Itoh, and T. Kobayashi, High-Efficiency MOSFET Bridge Rectifier for AlN MEMS Cantilever Vibration Energy Harvester, JAPANESE JOURNAL OF APPLIED PHYSICS, 56, 4，04CC03-1-04CC03-4, (2017)
  • T. Takeshita, T. Kobayashi, R. Takei, T. Itoh, S. Takamatsu, Soft-rubber-packaged Pb(Zr, Ti)O-3 MEMS touch sensors for human-machine interface applications, JAPANESE JOURNAL OF APPLIED PHYSICS, 56, 4, 04CC04 (2017)
  • H. Nogami, S. Arai, H. Okada, L. Zhan, T. Itoh, Minimized Bolus-Type Wireless Sensor Node with a Built-In Three-Axis Acceleration Meter for Monitoring a Cow's Rumen Conditions , SENSORS , 17, 4 , 687 (2017)
  • D. F. Wang, H. Liu, X. D. Li, Y. Li, WK. Xian, T. Kobayashi, T. Itoh, R. Maeda, Passive MEMS DC Electric Current Sensor: Part 1-Theoretical Considerations, IEEE Sensors Journal, 17, 1230 (2017)
  • D. F. Wang, H. Liu, X. D. Li, Y. Li, WK. Xian, T. Kobayashi, T. Itoh, R. Maeda, Passive MEMS DC Electric Current Sensor: Part II-Experimental Verifications, IEEE Sensors Journal, 17, 1238 (2017)

2016年

  • 鈴木章夫、藤本　淳、伊藤寿浩、前田竜太郎、無線センサを用いた大規模電力可視化ネットワーク実証実験、計測自動制御学会論文集、52(12) 698-706 2016年12月
  • Lan Zhang, Jian Lu, Hirofumi Nogami, Hironao Okada , Toshihiro Itoh, Developing a Solid-State pH Sensor for Wagyu-Rumen Monitoring, SENSORS AND MATERIALS 28, 1273-1281, 2016
  • T. Yamashita, S. Takamatsu, H. Okada, T. Itoh, T. Kobayashi, Ultrathin Piezoelectric Strain Sensor Array Integrated on Flexible Printed Circuit Involving Transfer Printing Methods, IEEE SENSORS JOURNAL 16, 8840-8846, 2016
  • Lan Zhang, Jian Lu, Hirofumi Nogami, Hironao Okada , Toshihiro Itoh, ITO-Based MEMS Sensor Electrode for Dynamic Cow-Rumen pH Sensing, IEEJ Transactions on Sensors and Micromachines 136, 482-487, 2016
  • Lan Zhang, Jian Lu, Ryouhei Takei, Natsumi Makimoto, Toshihiro Itoh, Takeshi Kobayashi, S-Shape Spring Sensor: Sensing Specific Low-Frequency Vibration by Energy Harvesting, REVIEW OF SCIENTIFIC INSTRUMENTS 87, 085005-1~8, 2016
  • L. Mattias Andersson, Hironao Okadaa, Ryotaro Miura, Yi Zhang, Koji Yoshioka, Hiroshi Aso, Toshihiro Itoh, Wearable Wireless Estrus Detection Sensor for Cows, Computers and Electronics in Agriculture, Vol.127, pp.101–108, 2016
  • Ryohei Takei, Natsumi Makimoto, Hironao Okada, Toshihiro Itoh, and Takeshi Kobayashi, Design of piezoelectric MEMS cantilever for low-frequency vibration energy harvester, Japanese Journal of Applied Physics 55, 06GP14 (2016).
  • S. Takamatsu, T. Lonjaret, E. Ismailova, A. Masuda, T. Itoh, and G. G. Malliaras, Wearable Keyboard Using Conducting Polymer Electrodes on Textiles, Advanced Materials, Vol. 28, 4485-4488 (2016).
  • Seiichi Takamatsu, Takahiro Yamashita, Toshihiro Itoh, Meter-scale large-area capacitive pressure sensors with fabric with strip electrodes of conductive polymer-coated fibers, Microsystem technologies, vol. 22, pp.451-457, 2016. (published online, 2015.3, DOI 10.1007/s00542-015-2498-3)
  • Seiichi Takamatsu, Takahiro Yamashita, Tetsuhiko Murakami, Atsuji Masuda, Toshihiro Itoh, Fabrication and evaluation of LED-embedded ribbons for highly flexible lighting applications in rooms, Microsystem technologies, vol. 22, pp. 1079-1087 , 2016 (published online, 2015.2 (DOI 10.1007/s00542-015-2467-x))
  • T. Yamashita, Y. Zhang, T. Itoh, and R. Maeda, Development of thin film based flexible current clamp sensor using screen-printed coil, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 22 , 3, 577-581, 2016

2015年

  • Seiichi Takamatsu, Takahiro Yamashita, Toshihiro Itoh, Meter-scale large area LED-embedded light fabric for the application of fabric ceilings in rooms, Microsystem technologies, vol. 21, pp. 1209-1217, 2015.4
  • Takahiro Yamashita, Hironao Okada, Toshihiro Itoh, and Takeshi Kobayashi, Manufacturing process for piezoelectric strain sensor sheet involving transfer printing methods”, Japanese Journal of Applied Physics 54, 10ND08 (2015)

2014年

  • H. Okada and T. Itoh : M-ary FSK Modulation Using Short Packet without a Preamble and Error Detection Codes for Low Power Wireless Communication, Wireless Sensor Network, 2014,6,35-42.
  • H. Okada, K. Suzuki, K. Tsukamoto and T. Itoh : Applicability of Wireless Activity-Sensor Network to Avian Influenza Monitoring System in Poultry Farms, J. Sensor Technology, 2014,4,18-23.
  • T. Yamashita, S. Takamatsu, K. Miyake, and T. Itoh : Antistiction Technique Using Elastomer Contact Structure in Woven Electronic Textiles, Jpn. J. Appl. Phys., 53 (2014), 04EK03.
  • S. Takamatsu, K. Kurihara, T. Yamashita and T. Itoh : Simple micro-patterning of high conductive polymer with UV-nano-imprinted patterned substrate and ethylene glycol-based second doping, J. Micromech. Microeng. 24(2014), 045024(7pp).
  • Z. Yang, Y. Zhang, T. Itoh, and R. Maeda: Flexible Implantable Micro Temperature Sensor Fabricated on Polymer Capillary by Programmable UV Lithography with Multilayer Alignment for Biomedical Applications,. Journal of Microelectromechanicalsystems, 23(2014)，21-29.
  • H. Okada and T. Itoh : Simultaneous Multi-channel Receiver for Sensor Network Systems with Star Topology, IEEJ Transactions on Sensors and Micromachines（電気学会論文誌E）, 134(2014), 72-73.
  • H. Okada, H. Nogami, T. Kobayashi, and T. Itoh : Ultra-low Power MEMS Activity Sensor for Wireless Health Monitoring System, IEEJ Transactions on Sensors and Micromachines（電気学会論文誌E）, 134(2014), 70-71.
  • T. Yamashita, K. Sommawan, K. Miyake, and T. Itoh : Characterization of Contact Structure for Woven Electronic Textile Using Conductive Polymer Micro-Cantilever Array, Electronics and Communications in Japan, 97(2014), 48-53.

2013年

  • H. Okada and T. Itoh : Development of Battery-Less Wireless Current Node Utilizing Charging Time of Capacitors with Wide Measurement Range, Wireless Sensor Network, 15(2013), 223-228.
  • H. Okada, H. Nogami, T. Kobayashi, and T. Itoh, : Avian influenza surveillance system with wearable wireless sensor node using Pb(Zr,Ti)O3 microcantilever, Sensors and Materials, 25(2013), 619-626.
  • H. Nogami, H. Okada, T. Miyamamoto, R. Maeda and T. Itoh : Wearable and Compact Wireless Sensor Nodes for Measuring the Temperature of the Base of a Calf’s Tail, Sensors and Materials, 25(2013), 577-582.
  • S. Takamatsu, T. Yamashita, T. Imai and T. Itoh, Fabric touch sensors using projected self-capacitive touch technique, Sensors and Materials, 25(2013), 1-8.
  • Y. Tomimatsu, H. Takahashi, T. Kobayashi, K. Matsumoto, I. Shimoyama, T. Itoh, and R. Maeda : A piezoelectric cantilever-type differential pressure sensor for low standby power trigger switch, J. Micromech. Microeng., 23(2013), 125023.
  • Y. Tomimatsu, H. Takahashi, K. Kuwana, T. Kobayashi, K. Matsumoto, I Shimoyama, T. Itoh, and R. Maeda : A piezoelectric flow sensor for use as a wake-up switch for a wireless sensor network node, Mechatronics, 23 (2013), 893-897.
  • H. Nogami, H. Okada, S. Takamatsu, T. Kobayashi, R. Maeda, and T. Itoh : Unique Activity-Meter with Piezoelectric Poly(vinylidene difluoride) Films and Self Weight of the Sensor Nodes, Jpn. J. Appl. Phys., 52 (2013) 09KD15
  • S. Takamatsu, T. Yamashita and T. Itoh : Development of reel-to-reel microchip mounting system for fabrication of meter-long LED lighting tapes, Microsyst. Technol., in press (DOI 10.1007/s00542-013-1925-6)
  • F. Honda, T. Hosono, M. Fujino, T. Suga, M. Ichiki and T. Itoh : Relationship between diffusion and adhesion properties of ferroelectric thin-film structure on releasable substrate, Jpn. J. Appl. Phys., 52(2013) 06GL16
  • K. Sueshige, M. Ichiki, T. Suga, and T. Itoh : Study on Homogeneous Wafer Level Dielectric Film Preparation Using Chemical Solution Deposition Method, Jpn. J. Appl. Phys., 52(2013) 06GL09
  • T. Yamashita, S. Takamatsu, K. Miyake, and T. Itoh : Fabrication and Evaluation of a Conductive Polymer Coated Elastomer Contact Structure for Woven Electronic Textile, Sensors and Actuators A, 195(2013), 213-218
  • H. Nogami, T. Kobayashi, H. Okada, N. Makimoto, R. Maeda and T. Itoh : Piezoelectric MEMS switch to activate event-driven wireless sensor nodes, Smart Materials and Structures, 22 (2013) 095001
  • K. Nishihara, W. Iwasaki, M. Nakamura, E. Higurashi, T. Soh, T. Itoh, H. Okada, R. Maeda, and R. Sawada : Development of a Wireless Sensor for the　Measurement of Chicken Blood Flow Using the　Laser Doppler Blood Flow Meter Technique, Biomedical Engineering, IEEE Transactions on, 60(2013) 1645-1653.
  • T. Naito, N. Konno, T. Tokunaga, and T. Itoh, Doping characteristics of polycrystalline silicon deposited by chemical transport at atmospheric pressure and its application to MEMS sensor, IEEE Sensors Journal, 13(2013), 2899 - 2905.
  • T. Imai, N. Shibayama, S. Takamatsu, K. Marumoto, T. Itoh : High-Speed Coating Method for Photovoltaic Textiles with Closed-Type Die Coater, , Jpn. J. Appl. Phys., 52(2013), 060201.
  • H. Okada and T. Itoh : Battery-less Wireless Current Sensor Node Utilizing the Dependence of Charging Time of a Capacitor on the Current Flowing through a Power Line, IEICE Electronics Express, 10(2013), 12, 1-6
  • Z. Yang, Y. Zhang, T. Itoh, and R. Maeda: New Fabrication Method of Three-Electrode System on Cylindrical Capillary Surface as a Flexible Implantable Microneedle, Surf. Rev. Lett., 20(2013), 1350027.
  • Q. S. Zhu, A. Toda, Y. Zhang, T. Itoh, and R. Maeda : High-Speed Copper Filling within High Aspect Ratio Through Holes in Polymer Substrates, Int. J. Electrochem. Sci., 8(2013), 10568-10577.
  • D.F. Wang, K. Isagawa, T. Kobayashi, T. Itoh, and R. Maeda : Passive piezoelectric single-side MEMS DC current sensor with five parallel PZT plates applicable to two-wire DC electric appliances without using cord separator, Microsyst. Technol., 19 (2013) 923-927
  • T. Kobayashi, S. Oyama, N. Makimoto, H. Okada, T. Itoh, R. Maeda : An electrostatic field sensor operated by self-excited vibration of MEMS-based piezoelectric microcantilevers, Sensors and Actuators A, 198 (2013), 87-90.
  • 山下崇博，高松誠一，小林健，伊藤寿浩：環境発電アプリケーションのための低共振周波数圧電ポリマーシートの開発，電気学会論文誌E，133(2013), 285-289.
  • 末重良宝，一木正聡，須賀唯知，伊藤寿浩：化学溶液塗布法による誘電体薄膜の高均質化とウェハレベル成膜，電気学会論文誌E，133(2013), 303-308.

2012年

  • K. Sueshige, K. IImura, M. Ichiki, T. Suga, and T. Itoh : Homogenizing and Applying Dielectric Film to Wafer-Level Film Preparation, Trans. Jpn. Inst. Electronics Packaging, 5(2012), 92-98.
  • E. Komine, M. Ozaki, T. Suga, M. Ichiki, and T. Itoh : Fabrication and Characterization of Ferroelectric PZT and BaTiO3 Thin Films on Releasable Electrode Structures, Trans. Jpn. Inst. Electronics Packaging, 5(2012), 34-40.
  • T. Yamashita, S. Takamatsu, K. Miyake, and T. Itoh : Improvement of Electrical Contact Reliability by Conductive Polymer Coated Elastomer Structure in Woven Electronic Textiles, Jpn. J. Appl. Phys,, 51(2012), 120204.
  • T. Yamashita, S. Takamatsu, K. Miyake, and T. Itoh : Fabrication of Conductive Polymer Coated Elastomer Contact Structures Using a Reel-to-Reel Continuous Fiber Process, IEICE Electronics Express, 9(2012), 1442-1447.
  • S. Uchiyama, M. Hayase, H. Takagi, T. Itoh and Y. Zhang: Spray Coating Deposition of Thin Resist Film on Fiber Substrates, Jpn. J. Appl. Phys., 51(2012), 116502
  • Z. Yang, Y. Zhang and T. Itoh, Fabrication of a MEMS Temperature Sensor on the Capillary Surface for Hyperthermia Intervention Monitoring : Procedia Engneering, 47(2012), 96-99
  • H. Nogami, T. Kobayashi, H. Okada, T. Masuda, R. Maeda and T. Itoh : Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices, Jpn. J. Appl. Phys., 51(2012), 09LD11
  • S. Takamatsu, T. Kobayashi, N. Shibayama, K. Miyake and T. Itoh : Fabric pressure sensor array fabricated with die-coating and weaving techniques, Sensors and Actuators A, 184(2012), 57-63
  • Y. Yokoyamaa, T. Murakamia, S. Izuob, Y. Yoshidaa, T. Itoh : Application of Silane-Free Atmospheric-Plasma Silicon Deposition to MEMS Devices, Sensors and Actuators A, 177(2012), 105–109
  • D.F. Wang, K. Isagawa, T. Kobayashi, T. Itoh, and R. Maeda : Developing passive piezoelectric MEMS sensor applicable to two-wire DC appliances with current switching, Micro & Nano Letters, 7 (2012), 68-71
  • 山下崇博，高松誠一，三宅晃司，伊藤寿浩，シリコンエラストマーを用いた製織シートデバイス用接点構造の開発とその評価，エレクトロニクス学会誌，15(2012), 558-564.
  • 山下崇博, 伊藤寿浩, 須賀唯知：原子間力顕微鏡を用いた湿度環境下における金属酸化膜の表面間力測定と水メニスカスモデルによる評価，電気学会論文誌E, 132(2012), 397-406.
  • 山下崇博, Khumpuang Sommawan, 三宅晃司, 伊藤寿浩：マイクロカンチレバーアレイを用いたフレキシブルデバイス用接点構造の特性評価, 電気学会論文誌E, 132(2012), 66-70.
  • 山下崇博，伊藤寿浩，須賀唯知，表面間力の定量評価に基づくMEMSスイッチのスティクション防止膜の検討，エレクトロニクス学会誌，15(2012), 49-58

2011年

  • S. Takamatsu, T. Kobayashi, T. Imai, T. Yamashita, and T. Itoh : All Polymer Piezoelectric Film for the Application to Low Resonance Frequency Energy Harvester, Procedia Engineering, 25(2011), 203-206
  • T. Yamashita, T. Itoh and T. Suga : Investigation of Anti-Stiction Coating for Ohmic Contact MEMS Switches with Thiophenol and 2-Naphthalenethiol Self-Assembled Monolayer, Sensors and Actuators A, 172(2011), 455-461.
  • S. Khumpuanga, K. Miyake, T. Itoh : Characterization of a SWNT-reinforced conductive polymer and patterning technique for applications of electronic textile, Sensors and Actuators A, 169(2011), 378–382
  • S Khumpuang, A Ohtomo, K Miyake and T Itoh : Fabrication and evaluation of a microspring contact array using a reel-to-reel continuous fiber process, J. Micromech. Microeng. 21(2011), No.10, 105019
  • T. Tada, K. Suzuki, Y. Sakurai, M. Kubo, H. Okada, T. Itoh, and K. Tsukamoto : Emergence of avian influenza viruses with enhanced transcription activity by a single amino acid substitution in the nucleoprotein during replication in chicken brains, J. Virol., 85(2011), pp.10354-10363
  • T. Kobayashi, H. Okada, T. Masuda, R. Maeda, T. Itoh : A digital output accelerometer using MEMS-based piezoelectric accelerometers and arrayed CMOS inverters with satellite capacitors, Smart Mater. Struct., 20(2011), 065017
  • T. Tada, K. Suzuki, Y. Sakurai, M. Kubo, H. Okada, T. Itoh, and K. Tsukamoto: NP body domain and PB2 contribute to increased virulence of H5N1 highlypathogenic avian Influenza viruses in chickens, J. Virol., 85 (2011), pp.1834-1846
  • 藤本淳, 三谷庸, 伊藤寿浩, 前田龍太郎 : 無線ユビキタスセンサを用いた電力モニタリング第二報：コンビニエンス・ストアへの応用,　Journalof Japan Society of Energy and Resources, 32(2011), pp.16-23
  • 藤本淳, 秦智之, 伊藤寿浩 : 無線ユビキタスセンサを用いた電力モニタリング第一報：社会実証実験とセンサの普及課題, Journal ofJapan Society of Energy and Resources, 32(2011), pp. 9-15.

2010年

  • T. Kobayashi, H. Okada, T. Masuda, R. Maeda, and T. Itoh : A digital output piezoelectric accelerometer using a Pb(Zr, Ti)O3 thin film array electrically connected in series, Smart Mater. Struct., 19(2010), 105030
  • K. Suzuki, H. Okada, T. Itoh, Tatsuya Tada, and K. Tsukamoto : Phenotypes influencing transmissibility of highly pathogenic avian influenza viruses in chickens, Journal of General Virology, 91(2010), pp.2302-2306
  • 伊藤寿浩、増田誉、塚本健司 : 安全・安心のためのアニマルウォッチセンサーの開発，Synthesiology, 3(2010), 231-240.

2009年

  • H. Okada, T. Itoh and T. Suga : Pressure Dependence of Resonant Characteristics of Lateral Comb Drive Resonators in the Free-Molecule Regime，Applied Physics Express，2(2009)，096501-1-096501-3
  • K. Suzuki, H. Okada, T. Itoh, T. Tada, S. Mase, K. Nakamura, M. Kubo, and K. Tsukamoto : Association of Increased Pathogenicity of Asian H5N1 Highly Pathogenic Avian Influenza Viruses in Chickens with Highly Efficient Viral Replication Accompanied by Early Destruction of Innate Immune Responses, Journal of Virology，83(2009)-15，pp.7475-7486
  • J. Lu, T. Ikehara, Y. Zhang, T. Mihara, T. Itoh, and R. Maeda, High Quality Factor Silicon Cantilever Driven by Piezoelectric Thin Film Actuator for Resonant Based Mass Detection, Microsyst. Technol., 15 (2009) 1163-1169
  • H. Okada, T. Kobayashi, T. Masuda, and T. Itoh : Ultra-Low Power Event-Driven Wireless Sensor Node Using Piezoelectric Accelerometer for Health Monitoring，Jpn. J. Appl. Phys., 48(2009)，070222- 1-3
  • D. Lee, H. Mekaru, H. Hiroshima, S. Matsumoto, T. Itoh, M. Takahashi, R. Maeda : 3D replication using PDMS mold for microcoil, Microelectronic Engineering，86(2009)，pp.920-924
  • T. Kobayashi, R. Maeda, and T. Itoh : Low Speed Piezoelectric Optical Microscanner Actuated by Piezoelectric Microcantilevers Using LaNiO3 buffered Pb(Zr,Ti)O3 Thin Film，Smart Materials and Structures,，18(2009)，065008- 1-6
  • J. Lu, T. Ikehara, Y. Zhang, T. Mihara, T. Itoh, R. Maeda : Characterization and Improvement on Quality Factor of Microcantilevers with Self-actuation and Self-sensing Capability，Microelectronic Engineering, 86(2009)，pp.1208-1211
  • Y. Zhang, J. Lu, H. Zhou, T.Itoh, and R. Maeda : Effects of Nanoimprint Pattern on Performance of MEMS-Based Micro Direct Methanol Fuel Cell, Journal of Micromechanical and Microengineering, 19(2009), pp.015003
  • Y. Zhang, J. Lu, Q. Wang, M. Takahashi, T. Itoh, and R. Maeda : Nanoimprint of Polymer Electrolyte Membrane for Micro Direct Methanol Fuel Cell Application, ECS Trans. 2009, 16(26), 11-17.
  • 岡田 浩尚、伊藤 寿浩、須賀唯知 : SCREAM法を用いた真空封止評価専用デバイスの開発，エレクトロニクス実装学会誌，12(2009)，pp.526-533
  • 岡田 浩尚、伊藤 寿浩、須賀唯知 : 常温封止接合におけるAuスパッタ薄膜表面形状の影響，エレクトロニクス実装学会誌，12(2009)，pp.534-541
  • 魯　健，張 毅，池原 毅，伊藤 寿浩，前田 龍太郎，三原 孝士 : Inductively Coupled Plasma Reactive Ion Etching of Lead Zirconate Titanate Thin Films for MEMS Application，電気学会センサ・マイクロマシン（Ｅ）部門誌，129(2009)，pp.105-109.

2008年

  • Y. Zhang, J. Lu, H. Zhou, T. Itoh, and R. Maeda : Application of Nanoimprint Technology in MEMS-based Micro Direct Methanol Fuel Cell (micron-DMFC)，Journal of Microelectromechanicalsystems, 17(2008)，pp.1020-1028
  • T. Kobayashi, R. Maeda and T. Itoh : A Fatigue test method for Pb(Zr,Ti)O3 thin films by using MEMS-based self-sensitive piezoelectric microcantilevers, Journal of Micromechanical and Microengineering,，18(2008)，115007
  • T. Kobayashi, S. Koyama, M. Takahashi, R. Maeda and T. Itoh : Microelectromechanical Systems-based Electrostatic Field Sensor Using Pb(Zr,Ti)O3 Thin Films，Jpn. J. Appl. Phys., 47 (2008)，7533-7536
  • H. Okada, T. Itoh, and T. Suga : Wafer level sealing characterization method using Si micro cantilevers，Sensors and Actuators A, 147(2008)，pp.359-364
  • H. Okada, T. Itoh, and T. Suga : The influence of surface profiles on leakage in room temperature seal-bonding，Sensors and Actuators A,，144(2008)，pp.124-129
  • R. Seto, Y. Sawae, E. Higurachi, T. Itoh, T. Masuda, K. Suzuki, K. Tsukamoto, T. Ikehara, R. Maeda, T. Fujitsu, and R. Sawada, Micro Optical Blood Flow Sensor Based on System in Package (SiP) Technology that uses Optical MEMS and Integrated Circuit to Detect Avian Influenza，Synthesis and Reactivity in Inorganic Metal-Organic and Nano-Metal Chemistry，38(2008)，pp.256-259
  • T. Kobayashi, R. Maeda, and T. Itoh : The influence of DC bias on displacement and sensor output of self-sensitive piezoelectric microcantilevers，Journal of Micromechanical and Microengineering，18(2008)，035025

2007年

  • J. Lu, T. Ikehara, Y. Zhang, T. Mihara, T. Itoh and R. Maeda : High-Q Silicon Cantilever Transduced by Piezoelectric Lead Zirconate Titanate Film for Mass Sensing Applications， Jpn. J. Appl. Phys., 46(2007)，pp.7643-7647
  • T. Kobayashi, T. Itoh, R. Sawada, and R. Maeda : Tunable Optical Micro Scanner Driven by Piezoelectric Actuator， Jpn. J. Appl. Phys., 46(2007)，pp.6429-6432
  • T. Kobayashi, T. Itoh, R. Sawada, and R. Maeda : Smart optical micro scanner with piezoelectric resonator, sensor and tuner using PZT thin film，Appl. Phys. Lett., 90(2007)，183514
  • K. Kataoka, T. Itoh, K. Okumura, and T. Suga, Low-force Electric Contact Processes on Cu electrodes, IEEE Transactions on Components and Packaging Technologies, 30(2007),194-199

2006年

  • A. Shigetou, T. Itoh, M. Matsuo, N. Hayasaka, K. Okumura and T. Suga : Bumpless Interconnect through Ultra-Fine Cu Electrodes by Means of Surface Activated Bonding (SAB), IEEE Transactions on Advanced Packaging, 29(2006), 218-226
  • 重藤暁津，伊藤寿浩，須賀唯知 : CMP-Cu薄膜の表面活性化常温直接接合における真空露出量の影響の評価，エレクトロニクス実装学会誌, 9(2006), 278-281

2005年

  • T. Itoh and T. Suga : Necessary Load for Room Temperature Vacuum Sealing, Journal of Micromechanics and Microengineering, 15(2005), S281-S285.
  • T. Itoh, S. Kawamura, K. Kataoka and T. Suga : Electroplated Ni Microcantilever Probe with Electrostatic Actuation, Sensors and Actuators A, 123-124(2005), 490-496.
  • A. Shigetou, T. Itoh and T. Suga : Direct bonding of CMP-Cu films by surface activated bonding (SAB) method”, Journal of Materials Science, 40(2005), 3149-3154
  • 岡田浩尚，伊藤寿浩，高木秀樹，前田龍太郎，須賀唯知 : Si/Si，Si/CuのAr高速原子ビームによる表面活性化常温封止接合，電子情報通信学会和文論文誌C , J88-C(2005), 913-919.
  • 重藤暁津，伊藤寿浩，須賀唯知 : Cu超微細電極の常温直接接合を用いたバンプレスインターコネクト，電子情報通信学会和文論文誌C, J88-C(2005), 889-896.

2004年

  • M. M. R. Howlader, H. Okada, T. H. Kim, T. Itoh, and T. Suga : Wafer Level Surface Activated Bonding Tool for MEMS Packaging, Journal of the Eelectrochemical Society, 151(2004), G461-467.

2003年

  • Q. Wang, N. Hosoda, T. Itoh and T. Suga : Reliability of Au bump-Cu direct interconnections fabricated by means of surface activated bonding method, Microelectronics Reliability, 43(2003), 751-756.
  • K. Kataoka, T. Itoh and T. Suga : Characterization of Fritting Phenomena on Al Electrode for Low Contact Force Probe Card, IEEE Transactions on Components and Packaging Technologies, 26(2003), 382-387.
  • T. H. Kim, M. M. R. Howlader, T. Itoh and T. Suga, Room temperature Cu-Cu direct bonding using surface activated bonding method, J. Vac. Sci. Technol. A, 21(2003), 449-453.
  • K. Kataoka, S. Kamamura, T. Itoh and T. Suga, K. Ishikawa and H. Honma : Electroplating Ni Micro-cantilevers for low contact-force IC probing, Sensors & Actuators A, 103(2003), 161-121.

2002年

  • T. Itoh, K. Kataoka and T. Suga : Characteristics of Low Force Contact Process for MEMS Probe Cards, Sensors & Actuators A, 97-98C(2002), 462-467.

2001年

  • JR. Chu, WH. Huang, R. Maeda, T. Itoh and T. Suga : Piezoelectric Pb(Zr, Ti)O3 micro-devices for scanning force microscopy and ultra-density data storage, Chinese Physics 10(2001), S167-S173.
  • 伊藤寿浩，片岡憲一，須賀唯知 : マイクロマシンプローブカードへのフリッティングコンタクトプロセスの適用可能性，精密工学会誌, 67(2001), 1239-1243.

2000年より以前

  • T. Itoh, T. Suga, G. Engelmann, J. Wolf, O. Ehrmann and H. Reichl : Characteristics of fritting contacts utilized for micromachined wafer probe cards, Rev. Sci. Instru., 71(2000), 2224-2227.
  • J. Chu, Z. Wang, R. Maeda, K. Kataoka, T. Itoh and T. Suga : Novel multibridge-structured piezoelectric microdevice for scanning force microscopy, J. Vac. Sci. Technol. B, 18(2000), 3604-3607.
  • 片岡憲一，Chu Jiaru，前田龍太郎，伊藤寿浩，須賀唯知 : 走査型力顕微鏡のための三次元駆動圧電マイクロカンチレバー，精密工学会誌, 66(2000), 965-969.
  • J. Chu, R. Maeda, T. Itoh, K. Kataoka and T. Suga : Microfabricated Dynamic Scanning Force Microscope Using a Three Dimensional Piezoelectric T-shape Actuator, Jpn. J. Appl. Phys., 38(1999), 7180-7184.
  • J. Chu, R. Maeda, T. Itoh and T. Suga : Tip-Scanning Dynamic Force Microscope Using Piezoelectric Cantilever for Full Wafer Inspection, Jpn. J. Appl. Phys., 38(1999), 7155-7158.
  • C. Lee, T. Itoh and T. Suga : Self-excited Piezoelectric PZT Microcatnilevers for Dynamic SFM - with Inherent Sensing and Actuating Capabilities, Sensors & Actuators A, 72(1999),179-188.
  • T. Itoh, R. Azumi and T. Suga : Piezoelectric Microcantilever Array for Multiprobe Scanning Force Microscopy, IEICE Trans. Electron., E80-C(1997), 269-273.
  • J. Chu, T. Itoh, C. Lee, K. Watanabe and T. Suga : Frequency Modulation Detection HV-SFM with a Self-Oscillating Piezoelectric Cantilever, J. Vac. Sci. Technol. B, 15(1997), 1647-1651.
  • J. Chu, T. Itoh, C. Lee, K. Watanabe and T. Suga : Novel High Vacuum Scanning Force Microscope Using Piezoelectric Cantilever and Phase Detection Method, J. Vac. Sci. Technol. B, 15(1997), 1551-1555.
  • C. Lee, T. Itoh, T. Ohashi, R. Maeda and T. Suga : Development of Piezoelectric Self-excitation and Self-detection Mechanism of PZT Microcantilevers for Dynamic SFM in Liquid, J. Vac. Sci. Technol. B, 15(1997), 1559-1563.
  • C. Lee, T. Itoh, R. Maeda, and T. Suga : Characterization of Micromachined Piezoelectric PZT Force Sensors for Dynamic SFM, Rev. Sci. Instru., 68(1997), 2091-2100.
  • C. Lee, T. Itoh and T. Suga : Sol-Gel derived PNNZT thin films for micromachined piezoelectric force sensors, Thin Solid Films., 299(1997), 88-93.
  • T. Itoh, T. Suga and C. Lee : Deflection detection and feedback actuation using a self-excited piezoelectric PZT microcantilever, Appl. Phys. Lett., 69(1996), 2036-2038.
  • T. Itoh, T. Ohashi and T. Suga : Noncontact scanning force microscopy using direct-oscillating piezoelectric microcantilever, J. Vac. Sci. Technol. B, 14(1996), 1577-1581.
  • T. Itoh and T. Suga : Self-excited force sensing microcantillevers with piezoelectric thin films for dynamic scanning force microscopy, Sensors and Actuators A, 54(1996), 477-481(1996).
  • C. Lee, S. Kawano, T. Itoh and T. Suga : Characteristics of Sol-gel Derived PZT Thin Films with Lead Oxide Cover Layers and Lead Titanate Interlayers, J. Mater. Sci., 31(1996), 4559-4568.
  • C. Lee, T. Itoh and T. Suga : Micromachined piezoelectric force sensors based on PZT thin films, IEEE Trans. on Ultrasonics, Piezoelectrics and Frequency Control, 43(1996), 553-559.
  • C. Lee, T. Itoh, G. Sasaki, K. Mizuishi and T. Suga : Sol-gel derived PZT force sensor for scanning force microscopy, Materials Chemistry and Physics, 44(1996), 25-29.
  • T. Tsuchiya, T. Itoh, G. Sasaki and T. Suga : Preparation and Properties of Piezoelectric Lead Zirconate Titanate Thin Films for Microsensors and Microactuators by Sol-Gel Processing, J. Ceram. Soc. Jpn., 104(1996), 159-163.
  • T. Itoh and T. Suga : Minimum detectable force gradients of piezoelectric microcantilever, J. Micromech. Microeng., 5(1995), 231-236.
  • T. Itoh and T. Suga : Scanning Force Microscope Using Piezoelectric Excitation and Detection, IEICE Trans. Electron., E78-C(1995), 146-151.
  • T. Itoh and T. Suga : Scanning force microscope using piezoelectric microcantilever, J. Vac. Sci. Technol. B, 12(1994), 1581-1585.
  • T. Itoh and T. Suga, Piezoelectric force sensor for scanning force microscopy, Sensors and Actuators A, 43(1994), 305-310.
  • T. Itoh and T. Suga : Force sensing microcantilever using sputtered zinc oxide thin film, Appl. Phys. Lett., 64(1994), 37-39.
  • T. Itoh and T. Suga: Piezoelectric Sensor for Detecting Force Gradients in Atomic Force Microscopy, Jpn. J. Appl. Phys., 33(1994), 334-340.
  • G. Sasaki, T. Tsuchiya, T. Itoh and T. Suga : Microstructure of PZT thin film prepared by sol-gel processing, Trans. Mat. Res. Soc. Jpn., 16B(1994), 1237-1240.
  • T. Itoh and T. Suga: Development of a force sensor for atomic force microscopy using piezoelectric thin films, Nanotechnology, 4(1993), 218-224.
  • 須賀唯知，伊藤寿浩 : 圧電薄膜式微小力センサーを用いた原子間力顕微鏡，マイクロマシン研究会誌, 6(1993), 132-135.

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